ارزیابی خواص سایش دمابالا و دماپایین پوشش‌های TiN رسوب داده شده در دماهای مختلف

نویسندگان

دانشکده مهندسی مواد، دانشگاه صنعتی اصفهان

چکیده

در این پژوهش پوشش نیترید تیتانیوم با استفاده از واکنش گرهای TiCl4، N2، H2 و Ar روی فولاد AISI H13 بهوسیله فرایند پوشش‌دهی رسوب شیمیایی بخار به کمک پلاسما ایجاد شد. پوشش­ ها در دماهای مختلف زیرلایه (460، 480 و 510 درجه سانتی‌گراد) ایجاد شدند. آزمون سایش از نوع ساچمه بر روی دیسک برای تعیین مکانیزم سایش در دمای بالا (400 درجه سانتی‌گراد) و دمای پایین (25 درجه سانتی‌گراد) انجام گرفت. خواص و ترکیب شیمیایی پوشش با استفاده از میکروسکوپ الکترونی روبشی، پراش اشعه­ ایکس و ریزسختی­ سنجی مورد ارزیابی قرار گرفت. نتایج آزمون سایش در دمای محیط بر حسب نرخ سایش بیان شد. آزمون سایش در دمای محیط نشان داد که پوشش TiN ایجاد شده در دمای 460 درجه سانتی‌گراد دارای کمترین میزان کاهش وزن است و این پوشش دارای بیشترین میزان سختی است. بهترین مقاومت به سایش برای پوششی با بیشترین سختی (1800 ویکرز) است. مکانیزم سایش با تغییر دمای سایش تغییر می‌کند. مشاهدات مسیر سایش نشان داد که سایش در دمای پایین به‌صورت خستگی سطحی است در حالی که سایش در دمای بالا از نوع چسبان است.

کلیدواژه‌ها


عنوان مقاله [English]

Evaluating the Properties of High-Temperature and Low-Temperature Wear of TiN Coatings Deposited at Different Temperatures

نویسندگان [English]

  • B. Khorrami Mokhori
  • A. Shafyei
  • A. Shafyei
چکیده [English]

In this research titanium nitride (TiN) films were prepared by plasma assisted chemical vapor deposition using TiCl4, H2, N2 and Ar on the AISI H13 tool steel. Coatings were deposited during different substrate temperatures (460°C, 480 ° C  and 510 °C). Wear tests were performed in order to study the acting wear mechanisms in the high(400 °C) and low (25 °C) temperatures by ball on disc method. Coating structure and chemical composition were characterized using scanning electron microscopy, microhardness and X-ray diffraction. Wear test result was described in ambient temprature according to wear rate. It was evidenced that the TiN coating deposited at 460 °C has the least weight loss with the highest hardness value. The best wear resistance was related to the coating with the highest hardness (1800 Vickers). Wear mechanisms were observed to change by changing wear temperatures. The result of wear track indicated that low-temprature wear has surface fatigue but high-temperature wear showed adhesive mechanism.

کلیدواژه‌ها [English]

  • Chemical vapour deposition
  • titanium nitride
  • Wear test
1. Badisce, E., Fontalvo, G., Stoiber M., and Mitterer, C “Tribological Behavior of PACVD TiN Coatings in the Temperature Range up to 500 C”, Surface and Coatings Technology, Vol. 163, pp. 585-590, 2003.
2. Stoiber, M., Badisce, E., Lugmair, C., and Mitterer, C., “Low-Friction TiN Coatings Deposited by PACVD”, Surface and Coatings Technology,
Vol. 163, pp. 451-456, 2003.
3. Mitterer, C., Holler, F., Reitberger, D., Badisch, E., Stoiber, M., Lugmair, C., Nobauer, R., Muller, T., and Kullmer, R., “Industrial Applications of PACVD Hard Coatings”, Surface and Coatings Technology, Vol. 163, pp. 716-722, 2000.
4. Ebrahimi, M., Mahboubi, F., and Naimi-Jamal, M.R., “Wear Behavior of DLC Film on Plasma Nitrocarburized AISI 4140 Steel by Pulsed DC PACVD: Effect of Nitrocarburizing Temperature”, Diamond and Related Materials, Vol. 52, pp. 32-37, 2015.
5. Bewilogua, K., Bräuera, G., Dietza, A., Gäblera, J., Gochb, G., Karpuschewskic, B., and Szyszkaa, B., “Surface Technology for Automotive Engineering”, CIRP Annals – Manufacturing Technology, Vol. 58, pp. 608-627, 2009.
6. Klimek, K.S., Gebauer-Teichmannb, A., Kaestnera, P., and Riea, K.T., “Duplex-PACVD Coating of Surfaces for Die Casting Tools” Surface and Coatings Technology, Vol. 201, pp. 5628-5632, 2007.
7. Son, S.-J., Yia, K-W., Mahrholzb, J., and Rie, K.-T., “Numerical Studies on up Scaling of Metal Organic PACVD Processes Used for Tribological Coating in Automotive Industry”, Surface and Coatings Technology, Vol. 201, pp. 7318-7326, 2007.
8. Podgornik, B., Leskovšek, V., and Arh, B., “The Effect of Heat Treatment on the Mechanical, Tribological and Load-Carrying Properties of PACVD-Coated Tool Steel”, Surface and Coatings Technology, Vol. 232, pp. 528-534, 2013.
9. Rees JR, W. S., CVD of Nonmetals, Wiley-VCH, 2008.
10. Jones, A. C., and Hitchman, M. L., Chemical Vapor Deposition: Precursors, Processes and Applications, Royal Society of Chemistry, 2009.
11. Choy, K., “Chemical Vapour Deposition of Coatings”, Progress in Materials Science, Vol. 48, pp. 57-170, 2003
12. Ierson, P.H. O., Handbook of Chemical Vapor Deposition: Principles, Technology and Applications, William Andrew, 1999.
13. Archer, N., “The Plasma-Assisted Chemical Vapour Deposition of Tic, Tin and TiCxN1− x”, Thin Solid Films, Vol. 80, pp. 221-225,1981.
14. Wanger, J., Mitterer, C., Penoy, M., Michotte, C., Wallgram, W., and Kathrein, M., “The Effect of Deposition Temperature on Microstructure and Properties of Thermal CVD TiN Coatings”, International Journal of Refractory Metals and Hard Materials, Vol. 26, pp. 120-126, 2008.
15. Mogensen, K. S., Thomsen, N. B., Eskildsen, S. S., Mathiasen, C., and Bottiger, J., “A Parametric Study of Themicrostructural, Mechanical and Tribological Properties of PACVD TiN Coatings”, Surface and Coatings Technology. Vol. 99, pp. 140-146, 1998.
16. Hilton, M. R., Salmeron, M., and Somorjai, G. A., “The Effect of Argon during the Plasma-Assisted Chemical Vapor Deposition of TiN”, Thin Solid Films, Vol. 167, pp. L31-L34, 1988.
17. Oguri, K., Fujita, H., and Arai, T., “Effect of N2-to-TiCl4 Flow Rate Ratio on the Properties of TiN Coatings Formed by D.C. Discharge Plasma-Assisted Chemical Vapor Deposition”, Thin Solid Films,
Vol. 195, pp. 77-88, 1991.
18. Hardell, J., and Prakash, B., “Tribological Performance of Surface Engineered Tool Steel at Elevated Temperatures”, International Journal of Refractory Metals and Hard Materials, Vol. 28,
pp. 106-114, 2010.
19. Takadoum, J., and Bennani, H. H., “Influence of Substrate Roughness and Coating Thickness on Adhesion, Friction and Wear of TiN Films”, Surface and Coatings Technology, Vol. 96, pp. 272-282, 1997.
20. Badisch, E., Stoiber, M., Fontalvo G., and Mitterer, C., “Low-Friction PACVD TiN Coatings: Influence of Cl-Content and Testing Conditions on the tribological properties”, Surface and Coatings Technology, Vol. 174, pp. 450-454, 2003.

تحت نظارت وف ایرانی