مروری بر حسگرهای گازی مقاومتی بر پایه اکسیدهای فلزی نیمه‌رسانا

نوع مقاله : مقاله‌ مروری

نویسندگان

دانشکده مهندسی و علم مواد، دانشگاه صنعتی شیراز، شیراز

چکیده

امروزه صنعتی شدن جوامع و بهبود کیفیت زندگی با مشکلاتی همچون آلودگی هوا و آلودگی‌های زیست‌محیطی همراه شده است؛ بنابراین، حسگرهای گازی به‌طور گسترده‌ای به‌منظور تشخیص گازها و بخارهای سمی و خطرناک در کاربردهای مختلف مورد استفاده قرار می‌گیرند. از بین حسگرهای گازی مختلف، حسگرهای گازی مقاومتی بر پایه اکسید‌های فلزی نیمه‌رسانا که اساس کار آن‌ها بر مبنای تغییرات مقاومت حسگر در حضور گاز هدف است، از جمله محبوب‌ترین انواع حسگرهای گازی هستند. این حسگرها دارای پاسخ حسگری مناسب، زمان پاسخ و زمان بازیابی کوتاه، پایداری فیزیکی و شیمیایی بالا و قیمت پایین هستند. در این مقاله مروری حسگرهای گازی مقاومتی بر پایه اکسیدهای فلزی نیمه‌رسانا مورد بحث و بررسی قرار می‌گیرند. جنبه‌های مختلف ساخت، سازوکار تشخیص گاز، روش‌های بهبود خواص حسگری و روش‌های کاهش مصرف انرژی در این حسگرها توضیح داده می‌شوند. این مقاله به‌گونه‌ای تنظیم و نوشته شده است که مفاهیم پایه و اساسی را برای علاقه‌مندان ورود به این حوزه فراهم کند.

کلیدواژه‌ها

عنوان مقاله [English]

A Review of Resistive Gas Sensors Based on Semiconducting Metal Oxides

نویسندگان [English]

  • A. Mirzaei
  • H. Shokrollahi
Department of Materials Science and Engineering, Shiraz University of Technology, Shiraz, Iran
چکیده [English]

Nowadays, the industrialization of societies and the improvement of the quality of life are associated with issues such as air pollution and environmental pollution. Hence, gas sensors are widely used to detect toxic and hazardous gases and vapors in various applications. Among the different gas sensors, resistive gas sensors based on semiconducting metal oxides, its work is based on changes in sensor resistance in the presence of the target gas, are among the most popular types of gas sensors. These sensors have high sensing response, short response and recovery time, high physical and chemical stability and low price. In this review article, resistive gas sensors based on semiconducting metal oxides are discussed. Various aspects of fabrication, gas sensing mechanism, strategies of improving sensing properties, and methods of reducing energy consumption in these sensors are explained. This article is organized and written in such a way as to provide the basic concepts for those interested in entering this field.

کلیدواژه‌ها [English]

  • Gas sensor
  • Gas sensing mechanism
  • Metal oxide
  • Semiconductor
  • Toxic gas

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مواد پیشرفته در مهندسی
دوره 41، شماره 2
شهریور 1401
صفحه 67-109

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